{"id":"https://openalex.org/W10294099","doi":"https://doi.org/10.1007/978-3-662-03838-3_20","title":"A Low Cost Angular Rate Sensor for Automotive Applications in Surface Micromachining Technology","display_name":"A Low Cost Angular Rate Sensor for Automotive Applications in Surface Micromachining Technology","publication_year":1999,"publication_date":"1999-01-01","ids":{"openalex":"https://openalex.org/W10294099","doi":"https://doi.org/10.1007/978-3-662-03838-3_20","mag":"10294099"},"language":"en","primary_location":{"id":"doi:10.1007/978-3-662-03838-3_20","doi":"https://doi.org/10.1007/978-3-662-03838-3_20","is_oa":false,"landing_page_url":"https://doi.org/10.1007/978-3-662-03838-3_20","pdf_url":null,"source":{"id":"https://openalex.org/S4306463937","display_name":"Springer eBooks","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/P4310319965","host_organization_name":"Springer Nature","host_organization_lineage":["https://openalex.org/P4310319965"],"host_organization_lineage_names":["Springer Nature"],"type":"ebook platform"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Advanced Microsystems for Automotive Applications 99","raw_type":"book-chapter"},"volume":{"id":"https://openalex.org/W2486251370","display_name":"Advanced Microsystems for Automotive Applications 99"},"type":"book-chapter","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5041446854","display_name":"Ralf Schellin","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I889804353","display_name":"Robert Bosch (Germany)","ror":"https://ror.org/01fe0jt45","country_code":"DE","type":"company","lineage":["https://openalex.org/I889804353"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"R. Schellin","raw_affiliation_strings":["Departments K8/STZ, K8/EIC, Robert Bosch GmbH, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Departments K8/STZ, K8/EIC, Robert Bosch GmbH, Germany","institution_ids":["https://openalex.org/I889804353"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5050959478","display_name":"A. Thomae","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I889804353","display_name":"Robert Bosch (Germany)","ror":"https://ror.org/01fe0jt45","country_code":"DE","type":"company","lineage":["https://openalex.org/I889804353"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"A. Thomae","raw_affiliation_strings":["Departments K8/STZ, K8/EIC, Robert Bosch GmbH, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Departments K8/STZ, K8/EIC, Robert Bosch GmbH, Germany","institution_ids":["https://openalex.org/I889804353"]}]},{"author_position":"middle","author":{"id":null,"display_name":"M. Lang","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I889804353","display_name":"Robert Bosch (Germany)","ror":"https://ror.org/01fe0jt45","country_code":"DE","type":"company","lineage":["https://openalex.org/I889804353"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"M. Lang","raw_affiliation_strings":["Departments K8/STZ, K8/EIC, Robert Bosch GmbH, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Departments K8/STZ, K8/EIC, Robert Bosch GmbH, Germany","institution_ids":["https://openalex.org/I889804353"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5016694687","display_name":"Wilfried Bauer","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I889804353","display_name":"Robert Bosch (Germany)","ror":"https://ror.org/01fe0jt45","country_code":"DE","type":"company","lineage":["https://openalex.org/I889804353"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"W. Bauer","raw_affiliation_strings":["Departments K8/STZ, K8/EIC, Robert Bosch GmbH, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Departments K8/STZ, K8/EIC, Robert Bosch GmbH, Germany","institution_ids":["https://openalex.org/I889804353"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5018133626","display_name":"J. Mohaupt","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I889804353","display_name":"Robert Bosch (Germany)","ror":"https://ror.org/01fe0jt45","country_code":"DE","type":"company","lineage":["https://openalex.org/I889804353"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"J. Mohaupt","raw_affiliation_strings":["Departments K8/STZ, K8/EIC, Robert Bosch GmbH, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Departments K8/STZ, K8/EIC, Robert Bosch GmbH, Germany","institution_ids":["https://openalex.org/I889804353"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5042412793","display_name":"G. Bischopink","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I889804353","display_name":"Robert Bosch (Germany)","ror":"https://ror.org/01fe0jt45","country_code":"DE","type":"company","lineage":["https://openalex.org/I889804353"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"G. Bischopink","raw_affiliation_strings":["Departments K8/STZ, K8/EIC, Robert Bosch GmbH, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Departments K8/STZ, K8/EIC, Robert Bosch GmbH, Germany","institution_ids":["https://openalex.org/I889804353"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5086441936","display_name":"L. Tanten","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I889804353","display_name":"Robert Bosch (Germany)","ror":"https://ror.org/01fe0jt45","country_code":"DE","type":"company","lineage":["https://openalex.org/I889804353"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"L. Tanten","raw_affiliation_strings":["Departments K8/STZ, K8/EIC, Robert Bosch GmbH, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Departments K8/STZ, K8/EIC, Robert Bosch GmbH, Germany","institution_ids":["https://openalex.org/I889804353"]}]},{"author_position":"middle","author":{"id":null,"display_name":"H. Baumann","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I889804353","display_name":"Robert Bosch (Germany)","ror":"https://ror.org/01fe0jt45","country_code":"DE","type":"company","lineage":["https://openalex.org/I889804353"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"H. Baumann","raw_affiliation_strings":["Departments K8/STZ, K8/EIC, Robert Bosch GmbH, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Departments K8/STZ, K8/EIC, Robert Bosch GmbH, Germany","institution_ids":["https://openalex.org/I889804353"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5069346141","display_name":"Harald Emmerich","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I889804353","display_name":"Robert Bosch (Germany)","ror":"https://ror.org/01fe0jt45","country_code":"DE","type":"company","lineage":["https://openalex.org/I889804353"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"H. Emmerich","raw_affiliation_strings":["Departments K8/STZ, K8/EIC, Robert Bosch GmbH, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Departments K8/STZ, K8/EIC, Robert Bosch GmbH, Germany","institution_ids":["https://openalex.org/I889804353"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5089867110","display_name":"Stefan Pinter","orcid":"https://orcid.org/0000-0002-0433-4951","observed_orcids":["https://orcid.org/0000-0002-0433-4951"]},"institutions":[{"id":"https://openalex.org/I889804353","display_name":"Robert Bosch (Germany)","ror":"https://ror.org/01fe0jt45","country_code":"DE","type":"company","lineage":["https://openalex.org/I889804353"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"S. Pint\u00e9r","raw_affiliation_strings":["Departments K8/STZ, K8/EIC, Robert Bosch GmbH, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Departments K8/STZ, K8/EIC, Robert Bosch GmbH, Germany","institution_ids":["https://openalex.org/I889804353"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5049467714","display_name":"Jiri Marek","orcid":"https://orcid.org/0000-0001-8239-9438","observed_orcids":["https://orcid.org/0000-0001-8239-9438"]},"institutions":[{"id":"https://openalex.org/I889804353","display_name":"Robert Bosch (Germany)","ror":"https://ror.org/01fe0jt45","country_code":"DE","type":"company","lineage":["https://openalex.org/I889804353"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"J. Marek","raw_affiliation_strings":["Departments K8/STZ, K8/EIC, Robert Bosch GmbH, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Departments K8/STZ, K8/EIC, Robert Bosch GmbH, Germany","institution_ids":["https://openalex.org/I889804353"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5020234031","display_name":"Karsten Funk","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I889804353","display_name":"Robert Bosch (Germany)","ror":"https://ror.org/01fe0jt45","country_code":"DE","type":"company","lineage":["https://openalex.org/I889804353"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"K. Funk","raw_affiliation_strings":["Department FV/FLI, Robert Bosch GmbH, Stuttgart, Germany","Departments K8/STZ, K8/EIC, Robert Bosch GmbH, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department FV/FLI, Robert Bosch GmbH, Stuttgart, Germany","institution_ids":["https://openalex.org/I889804353"]},{"raw_affiliation_string":"Departments K8/STZ, K8/EIC, Robert Bosch GmbH, Germany","institution_ids":["https://openalex.org/I889804353"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5068743175","display_name":"Gunar Lorenz","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I889804353","display_name":"Robert Bosch (Germany)","ror":"https://ror.org/01fe0jt45","country_code":"DE","type":"company","lineage":["https://openalex.org/I889804353"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"G. Lorenz","raw_affiliation_strings":["Department FV/FLI, Robert Bosch GmbH, Stuttgart, Germany","Departments K8/STZ, K8/EIC, Robert Bosch GmbH, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department FV/FLI, Robert Bosch GmbH, Stuttgart, Germany","institution_ids":["https://openalex.org/I889804353"]},{"raw_affiliation_string":"Departments K8/STZ, K8/EIC, Robert Bosch GmbH, Germany","institution_ids":["https://openalex.org/I889804353"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5079446871","display_name":"Reinhard Neul","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I889804353","display_name":"Robert Bosch (Germany)","ror":"https://ror.org/01fe0jt45","country_code":"DE","type":"company","lineage":["https://openalex.org/I889804353"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"R. Neul","raw_affiliation_strings":["Department FV/FLI, Robert Bosch GmbH, Stuttgart, Germany","Departments K8/STZ, K8/EIC, Robert Bosch GmbH, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department FV/FLI, Robert Bosch GmbH, Stuttgart, Germany","institution_ids":["https://openalex.org/I889804353"]},{"raw_affiliation_string":"Departments K8/STZ, K8/EIC, Robert Bosch GmbH, Germany","institution_ids":["https://openalex.org/I889804353"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I889804353"],"apc_list":null,"apc_paid":null,"fwci":10.2148,"has_fulltext":false,"cited_by_count":25,"citation_normalized_percentile":{"value":0.97396963,"is_in_top_1_percent":false,"is_in_top_10_percent":true},"cited_by_percentile_year":{"min":88,"max":97},"biblio":{"volume":null,"issue":null,"first_page":"239","last_page":"250"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9887999892234802,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9887999892234802,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11325","display_name":"Inertial Sensor and Navigation","score":0.010200000368058681,"subfield":{"id":"https://openalex.org/subfields/2202","display_name":"Aerospace Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12564","display_name":"Sensor Technology and Measurement Systems","score":0.00039999998989515007,"subfield":{"id":"https://openalex.org/subfields/3105","display_name":"Instrumentation"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/angular-rate-sensor","display_name":"angular rate sensor","score":0.9909999966621399},{"id":"https://openalex.org/keywords/mems-gyroscope","display_name":"MEMS gyroscope","score":0.8259999752044678},{"id":"https://openalex.org/keywords/surface-micromachining","display_name":"surface micromachining","score":0.9620000123977661},{"id":"https://openalex.org/keywords/electrostatic-actuation","display_name":"electrostatic actuation","score":0.8069999814033508},{"id":"https://openalex.org/keywords/oscillating-disk","display_name":"oscillating disk","score":0.902999997138977},{"id":"https://openalex.org/keywords/conservation-of-angular-momentum","display_name":"angular momentum conservation","score":0.8370000123977661},{"id":"https://openalex.org/keywords/vehicle-sensors","display_name":"automotive sensors","score":0.8539999723434448},{"id":"https://openalex.org/keywords/low-cost-sensors","display_name":"low-cost sensors","score":0.6290000081062317},{"id":"https://openalex.org/keywords/self-testing","display_name":"self-testing","score":0.48899999260902405},{"id":"https://openalex.org/keywords/sensitivity-calibration","display_name":"sensitivity calibration","score":0.734000027179718}],"concepts":[{"id":"https://openalex.org/C145667562","wikidata":"https://www.wikidata.org/wiki/Q7646003","display_name":"Surface micromachining","level":4,"score":0.8238649368286133},{"id":"https://openalex.org/C526921623","wikidata":"https://www.wikidata.org/wiki/Q190117","display_name":"Automotive industry","level":2,"score":0.5619426965713501},{"id":"https://openalex.org/C2779844322","wikidata":"https://www.wikidata.org/wiki/Q2919140","display_name":"Tilt (camera)","level":2,"score":0.5349971055984497},{"id":"https://openalex.org/C32688793","wikidata":"https://www.wikidata.org/wiki/Q827664","display_name":"Tilt sensor","level":3,"score":0.5154010057449341},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.5103978514671326},{"id":"https://openalex.org/C2779843651","wikidata":"https://www.wikidata.org/wiki/Q7390335","display_name":"SIGNAL (programming language)","level":2,"score":0.42143696546554565},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.3809807002544403},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.35829582810401917},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.3359454274177551},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.335257351398468},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.24045240879058838},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.20034950971603394},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.18054166436195374},{"id":"https://openalex.org/C78519656","wikidata":"https://www.wikidata.org/wiki/Q101333","display_name":"Mechanical engineering","level":1,"score":0.16340306401252747},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.14781147241592407},{"id":"https://openalex.org/C146978453","wikidata":"https://www.wikidata.org/wiki/Q3798668","display_name":"Aerospace engineering","level":1,"score":0.09350752830505371},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0},{"id":"https://openalex.org/C199360897","wikidata":"https://www.wikidata.org/wiki/Q9143","display_name":"Programming language","level":1,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C194232370","wikidata":"https://www.wikidata.org/wiki/Q162","display_name":"Optical fiber","level":2,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1007/978-3-662-03838-3_20","doi":"https://doi.org/10.1007/978-3-662-03838-3_20","is_oa":false,"landing_page_url":"https://doi.org/10.1007/978-3-662-03838-3_20","pdf_url":null,"source":{"id":"https://openalex.org/S4306463937","display_name":"Springer eBooks","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/P4310319965","host_organization_name":"Springer Nature","host_organization_lineage":["https://openalex.org/P4310319965"],"host_organization_lineage_names":["Springer Nature"],"type":"ebook platform"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Advanced Microsystems for Automotive Applications 99","raw_type":"book-chapter"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":5,"referenced_works":["https://openalex.org/W2032624074","https://openalex.org/W2049199634","https://openalex.org/W2163830127","https://openalex.org/W2187269323","https://openalex.org/W2257261790"],"related_works":["https://openalex.org/W2262500995","https://openalex.org/W2123106353","https://openalex.org/W2114003865","https://openalex.org/W2128820019","https://openalex.org/W2083932672","https://openalex.org/W2039400597","https://openalex.org/W2146552095","https://openalex.org/W2393593845","https://openalex.org/W1960325091","https://openalex.org/W1948193777"],"abstract_inverted_index":null,"counts_by_year":[{"year":2020,"cited_by_count":1},{"year":2015,"cited_by_count":1},{"year":2013,"cited_by_count":4},{"year":2012,"cited_by_count":1}],"updated_date":"2026-10-10T09:11:00.788812","created_date":"2016-06-24T00:00:00"}