{"id":"https://openalex.org/T11301","display_name":"Advanced Surface Polishing Techniques","description":"This cluster of papers focuses on the techniques, mechanisms, and simulations related to chemical mechanical polishing (CMP) in the context of microelectronics manufacturing. 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mechanism","score":0.3783},{"id":"https://openalex.org/keywords/electropolishing","display_name":"electropolishing","score":0.2294},{"id":"https://openalex.org/keywords/magnetic-abrasive-finishing","display_name":"magnetic abrasive finishing","score":0.8826},{"id":"https://openalex.org/keywords/subsurface-damage","display_name":"subsurface damage","score":0.3802},{"id":"https://openalex.org/keywords/ultra-precision-machining","display_name":"ultra-precision machining","score":0.2671},{"id":"https://openalex.org/keywords/polishing-pad","display_name":"polishing pad","score":0.9284},{"id":"https://openalex.org/keywords/polishing-slurry","display_name":"polishing slurry","score":0.9289},{"id":"https://openalex.org/keywords/magnetorheological-finishing","display_name":"magnetorheological finishing","score":0.8719},{"id":"https://openalex.org/keywords/lapping","display_name":"lapping","score":0.51},{"id":"https://openalex.org/keywords/polishing-mechanism","display_name":"polishing 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Tomography Applications"},{"id":"https://openalex.org/T11582","display_name":"Nanopore and Nanochannel Transport Studies"},{"id":"https://openalex.org/T11608","display_name":"Dielectric materials and actuators"},{"id":"https://openalex.org/T11667","display_name":"Advanced Chemical Sensor Technologies"},{"id":"https://openalex.org/T11739","display_name":"Microwave Imaging and Scattering Analysis"},{"id":"https://openalex.org/T11788","display_name":"Nonlinear Optical Materials Studies"},{"id":"https://openalex.org/T11802","display_name":"Chemical Looping and Thermochemical Processes"},{"id":"https://openalex.org/T11808","display_name":"Superconducting Materials and Applications"},{"id":"https://openalex.org/T11932","display_name":"Wireless Body Area Networks"},{"id":"https://openalex.org/T11984","display_name":"Anatomy and Medical Technology"},{"id":"https://openalex.org/T12015","display_name":"Photoacoustic and Ultrasonic 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