{"id":"https://openalex.org/T10377","display_name":"Metal and Thin Film Mechanics","description":"This cluster of papers focuses on the mechanical properties, fabrication techniques, and performance evaluation of thin film coatings, particularly in the context of nanoindentation, sputtering, and tribological behavior. It covers topics such as hardness, elastic modulus, nanocomposites, and the use of advanced characterization techniques like X-ray photoelectron spectroscopy.","keywords":[{"id":"https://openalex.org/keywords/nanoindentation","display_name":"nanoindentation","score":0.3017},{"id":"https://openalex.org/keywords/diamond-like-carbon-films","display_name":"diamond-like carbon films","score":0.3192},{"id":"https://openalex.org/keywords/titanium-nitride-coatings","display_name":"TiN coating","score":0.3277},{"id":"https://openalex.org/keywords/hard-coatings","display_name":"hard coatings","score":0.4399},{"id":"https://openalex.org/keywords/reactive-magnetron-sputtering","display_name":"reactive magnetron sputtering","score":0.3323},{"id":"https://openalex.org/keywords/thin-film-adhesion","display_name":"film adhesion","score":0.2402},{"id":"https://openalex.org/keywords/coating-hardness","display_name":"coating hardness","score":0.2043},{"id":"https://openalex.org/keywords/diamond-like-carbon","display_name":"diamond-like carbon","score":0.2302},{"id":"https://openalex.org/keywords/scratch-test","display_name":"scratch test","score":0.3428},{"id":"https://openalex.org/keywords/nanohardness","display_name":"nanohardness","score":0.2602},{"id":"https://openalex.org/keywords/hardness-testing","display_name":"hardness testing","score":0.254},{"id":"https://openalex.org/keywords/tialn-coating","display_name":"TiAlN coating","score":0.4619},{"id":"https://openalex.org/keywords/titanium-nitride-thin-films","display_name":"titanium nitride thin films","score":0.5295},{"id":"https://openalex.org/keywords/high-power-impulse-magnetron-sputtering","display_name":"high power impulse magnetron sputtering","score":0.3833},{"id":"https://openalex.org/keywords/dc-magnetron-sputtering","display_name":"DC magnetron sputtering","score":0.2052},{"id":"https://openalex.org/keywords/pvd-coatings","display_name":"PVD coatings","score":0.3461},{"id":"https://openalex.org/keywords/chromium-nitride","display_name":"chromium nitride","score":0.3574},{"id":"https://openalex.org/keywords/cathodic-arc-deposition","display_name":"cathodic arc deposition","score":0.4917},{"id":"https://openalex.org/keywords/unbalanced-magnetron-sputtering","display_name":"unbalanced magnetron sputtering","score":0.6356},{"id":"https://openalex.org/keywords/film-hardness","display_name":"film hardness","score":0.3782},{"id":"https://openalex.org/keywords/hydrogenated-amorphous-carbon","display_name":"hydrogenated amorphous carbon","score":0.2204},{"id":"https://openalex.org/keywords/arc-ion-plating","display_name":"arc ion plating","score":0.5646},{"id":"https://openalex.org/keywords/indentation-size-effect","display_name":"indentation size effect","score":0.5205},{"id":"https://openalex.org/keywords/cutting-tool-coatings","display_name":"tool coatings","score":0.2734},{"id":"https://openalex.org/keywords/substrate-bias-voltage","display_name":"substrate bias voltage","score":0.4653}],"legacy_keywords":"Nanoindentation; Thin Films; Coatings; Mechanical Properties; Sputtering; Hardness; Elastic Modulus; Nanocomposites; Tribological Behavior; X-ray Photoelectron Spectroscopy","ids":{"openalex":"https://openalex.org/T10377","wikipedia":"https://en.wikipedia.org/wiki/Thin-film_deposition"},"subfield":{"id":"https://openalex.org/subfields/2211","display_name":"Mechanics of Materials"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"},"siblings":[{"id":"https://openalex.org/T10161","display_name":"Rock Mechanics and Modeling"},{"id":"https://openalex.org/T10219","display_name":"Mechanical Behavior of Composites"},{"id":"https://openalex.org/T10221","display_name":"Composite Structure Analysis and Optimization"},{"id":"https://openalex.org/T10396","display_name":"Fatigue and fracture mechanics"},{"id":"https://openalex.org/T10399","display_name":"Hydrocarbon exploration and reservoir analysis"},{"id":"https://openalex.org/T10514","display_name":"Numerical methods in engineering"},{"id":"https://openalex.org/T10662","display_name":"Ultrasonics and Acoustic Wave Propagation"},{"id":"https://openalex.org/T10806","display_name":"Energetic Materials and Combustion"},{"id":"https://openalex.org/T11201","display_name":"Metallurgy and Material Forming"},{"id":"https://openalex.org/T11202","display_name":"Cavitation Phenomena in Pumps"},{"id":"https://openalex.org/T11558","display_name":"Composite Material Mechanics"},{"id":"https://openalex.org/T11565","display_name":"Thermoelastic and Magnetoelastic Phenomena"},{"id":"https://openalex.org/T11799","display_name":"Adhesion, Friction, and Surface Interactions"},{"id":"https://openalex.org/T11854","display_name":"Laser-induced spectroscopy and plasma"},{"id":"https://openalex.org/T11856","display_name":"Thermography and Photoacoustic Techniques"},{"id":"https://openalex.org/T12118","display_name":"Forest Biomass Utilization and Management"},{"id":"https://openalex.org/T12252","display_name":"Mechanical stress and fatigue analysis"},{"id":"https://openalex.org/T12362","display_name":"Tribology and Wear Analysis"},{"id":"https://openalex.org/T12537","display_name":"Flow Measurement and Analysis"},{"id":"https://openalex.org/T12579","display_name":"Muon and positron interactions and applications"},{"id":"https://openalex.org/T12971","display_name":"Material Properties and Processing"},{"id":"https://openalex.org/T13261","display_name":"Elasticity and Wave Propagation"},{"id":"https://openalex.org/T13619","display_name":"Geotechnical and Geomechanical Engineering"},{"id":"https://openalex.org/T13772","display_name":"Geomechanics and Mining Engineering"},{"id":"https://openalex.org/T13862","display_name":"Soil, Finite Element Methods"},{"id":"https://openalex.org/T13891","display_name":"Engineering Diagnostics and Reliability"},{"id":"https://openalex.org/T14204","display_name":"Railway Systems and Materials Science"},{"id":"https://openalex.org/T14479","display_name":"Freezing and Crystallization Processes"}],"works_count":89216,"cited_by_count":1266702,"works_api_url":"https://api.openalex.org/works?filter=topics.id:T10377","updated_date":"2026-10-22T03:01:35","created_date":"2024-01-23T15:27:06"}