{"id":"https://openalex.org/keywords/microlithography","display_name":"microlithography","description":"A semiconductor fabrication technique for transferring microscopic patterns onto a substrate, typically using radiation-sensitive materials and etching.","display_name_alternatives":["micro-lithography"],"ids":{"openalex":"https://openalex.org/keywords/microlithography","wikidata":"https://www.wikidata.org/wiki/Q109875360"},"primary_topic":{"id":"https://openalex.org/T11338","display_name":"Advancements in Photolithography Techniques","score":0.5126,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11338","display_name":"Advancements in Photolithography Techniques","score":0.5126,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"works_count":1877,"cited_by_count":23079,"works_api_url":"https://api.openalex.org/works?filter=keywords.id:keywords/microlithography","updated_date":"2026-10-22T04:07:25","created_date":"2026-09-30T00:00:00"}