{"id":"https://openalex.org/keywords/large-area-patterning","display_name":"large-area patterning","description":"A fabrication approach for forming defined structures over broad substrate areas, used in microelectronics, nanotechnology, and thin-film device production.","display_name_alternatives":["patterning over large areas","patterning of large areas"],"ids":{"openalex":"https://openalex.org/keywords/large-area-patterning","wikidata":null},"primary_topic":{"id":"https://openalex.org/T12224","display_name":"Nanofabrication and Lithography Techniques","score":0.3929,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T12224","display_name":"Nanofabrication and Lithography Techniques","score":0.3929,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11338","display_name":"Advancements in Photolithography Techniques","score":0.1464,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"works_count":847,"cited_by_count":15986,"works_api_url":"https://api.openalex.org/works?filter=keywords.id:keywords/large-area-patterning","updated_date":"2026-10-20T04:07:40","created_date":"2026-09-30T00:00:00"}